FOUNDRY SERVICES AND PRODUCTS

Foundry Services- Photonics, MEMS, Microfluidics, Solar Cells

1. Submicron Photolithography
      a. Feature sizes to .25micron using our 248nm scanner
      b. Choice of thin resist for fine features or thick resist for deep etching
2. PECVD Thin Films
      a. Silicon oxide and silicon rich oxide
      b. Silicon Nitride
      c. Silicon oxynitride and silicon rich oxynitride
3. Metal Sputter Deposition
      a. Aluminum
      b. Titanium
      c. Cobalt
4. Plasma Dry Etch
      a. Silicon etch
      b. Silicon oxide etch
      c. Silicon nitride etch
      d. Metal etch
5. Wet Etch
      a. Silicon oxide etch
      b. Silicon etch
      c. Metal etch
6. Thin Film Metrology
      a. Optical thickness measurements
      b. Topographical feature measurements
7. SEM images of submicron structures
      a. Images of photoresist, oxide, silicon and metal features
      b. Resolution down to 5 nm

Products-